A vacuum coating machine is a device that deposits thin films by means of a vacuum environment, and is widely used in the fields of optics, electronics, and decoration. The following are general vacuum coating machine guidelines and operating procedures.
1. Equipment inspection and preparation
Check the vacuum system: make sure that the vacuum pump, valves, pipelines and other connections are normal and without leakage, and ensure that there is no abnormality in the vacuum system.
Equipment power supply and gas source: make sure that the power supply and gas source are normally connected and the gas supply pipeline has no leakage.
Check the coating material: make sure the coating material has been correctly placed and meets the process requirements.
2. Equipment start-up
Main power on: Press the main power switch of the equipment to start the electronic control system of the vacuum coating machine.
Vacuum system start-up: Start the pre-evacuation vacuum pump and the main vacuum pump in turn, gradually reduce the pressure in the chamber to reach the vacuum degree required by the process.
Setting process parameters: set the coating time, power, gas flow, substrate temperature and other parameters according to the process requirements.
3. Coating process
Heating the coating material: start the heating device (such as resistance heating or electron beam heating), so that the coating material evaporates or sputtering into molecules or atoms, deposited on the surface of the workpiece to be coated.
Control atmosphere: According to the process requirements, add gas (such as oxygen, nitrogen, etc.) to control the atmosphere of the coating process.
Real-time monitoring: Check the parameters of vacuum, temperature, gas flow rate, etc. through the monitoring system to ensure the stability of the process.
4. Coating completion and shutdown
Stop coating: After coating is completed, stop the heating device and gas supply.
Relieve vacuum: slowly open the vacuum valve and gradually return to atmospheric pressure.
Take out the workpiece: After the pressure in the chamber returns to normal pressure, open the chamber and take out the coated workpiece.
5. Maintenance and upkeep
Clean the vacuum chamber: clean the inner wall of the coating chamber regularly to prevent the accumulation of materials affecting the process.
Check the vacuum pump and pipeline: check the running condition of the vacuum pump regularly, replace the wear parts in time and keep the system sealed.
Replacement of coating materials: replace or replenish coating materials regularly according to the process demand.
6. Safety matters
High-temperature and high-voltage protection: pay attention to the high-temperature parts and high-voltage power supply of the equipment during operation to avoid accidental contact.
Vacuum system safety: avoid opening the vacuum chamber suddenly when the equipment is running to prevent damage to the equipment or accidents.
Common faults and troubleshooting methods
1. Vacuum degree does not reach the standard
Failure phenomenon: after the vacuum pump starts, the vacuum degree cannot reach the set value.
Possible causes:
Seals are damaged or aging.
Connection piping leakage.
Vacuum pump failure.
Remedy:
Check and replace seals.
Check piping connections and repair air leaks.
Check the working condition of the vacuum pump and maintain or replace if necessary.
2. Uneven sputtering
Fault phenomenon: Uneven thickness of deposited film, spots or shadows.
Possible causes:
Substrate is not fixed firmly.
Sputtering target is damaged.
Unstable gas flow.
Troubleshooting:
Ensure that the substrate fixture is securely fixed to avoid wobbling.
Inspect the target surface and replace if necessary.
Adjust the gas flow rate to ensure it is within the set range.
3. Abnormal power supply
Fault phenomenon: The power indicator does not light up or the device cannot be started.
Possible causes:
Power supply failure or loose plug.
Fuse blown.
Troubleshooting method:
Check the power plug and power cord connections.
Check the fuse and replace if necessary.
4. Abnormal noise
Fault phenomenon: The equipment makes abnormal noise during operation.
Possible causes:
The vacuum pump is not running normally.
Wear of moving parts or lack of oil.
Remedy:
Check the operating condition of the vacuum pump, clean or replace necessary parts.
Check moving parts, replenish oil or replace worn parts.
5. Overheating of sputtering target
Failure phenomenon: The sputtering target temperature is too high, which may lead to target damage.
Possible cause:
Sputtering power setting too high.
Cooling system failure.
Troubleshooting:
Adjust the sputtering power to ensure that it is within a reasonable range.
Check the cooling system to make sure it is functioning properly.
6. Display or control panel failure
Fault: Control panel is unresponsive or displays incorrectly.
Possible causes:
Loose connection cable.
Control panel malfunction.
Troubleshooting:
Check the connecting wires to ensure good contact.
Restart the unit and if the problem persists, consider replacing the control panel.
Maintenance Recommendations
Regular inspections: Establish a regular inspection program to identify potential problems in a timely manner.
Train operators: Ensure that operators are familiar with equipment operation and troubleshooting procedures to improve their ability to respond.
Through the above troubleshooting and elimination methods, operators can more effectively maintain and manage the vacuum sputtering machine to ensure its normal operation.
